buildworld fails RC1 -> RC2

After upgrading the src tree from RC1 to RC2 using cvsup RELENG_5_3
'make buildworld' failed twice even with a clean /usr/obj

tail -100 of output:
-------------------

<snip>
mkdep -f .depend -a    -I. -DIN_GCC -DHAVE_CONFIG_H 
-DPREFIX=\"/usr/obj/usr/src/i386/usr\" 
-I/usr/obj/usr/src/i386/usr/src/gnu/usr.bin/cc/cc_tools/../cc_tools 
-I/usr/src/gnu/usr.bin/cc/cc_tools/../cc_tools
-I/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc 
-I/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/config 
-DGENERATOR_FILE -I/usr/obj/usr/src/i386/legacy/usr/include 
/usr/src/gnu/usr.bin/
cc/cc_tools/../../../../contrib/gcc/choose-temp.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/concat.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/cp-demangle.c 
/usr/src/gnu/usr.bi
n/cc/cc_tools/../../../../contrib/gcc/cp-demint.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/cplus-dem.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/dyn-string.c 
/usr/src/gnu/usr.
bin/cc/cc_tools/../../../../contrib/gcc/fibheap.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/getpwd.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/getruntime.c 
/usr/src/gnu/usr.bin
/cc/cc_tools/../../../../contrib/gcc/hashtab.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/hex.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/lbasename.c 
/usr/src/gnu/usr.bin/cc/cc_
tools/../../../../contrib/gcc/make-temp-file.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/md5.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/obstack.c 
/usr/src/gnu/usr.bin/cc/cc_to
ols/../../../../contrib/gcc/partition.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/pex-unix.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/physmem.c 
/usr/src/gnu/usr.bin/cc/cc_tool
s/../../../../contrib/gcc/splay-tree.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/xexit.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/xmalloc.c 
/usr/src/gnu/usr.bin/cc/cc_tools/..
/../../../contrib/gcc/xmemdup.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/xstrdup.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/xstrerror.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../..
/../../contrib/gcc/bitmap.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/dummy-conditions.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/errors.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../
../../../contrib/gcc/genautomata.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/gensupport.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/ggc-none.c 
/usr/src/gnu/usr.bin/cc/cc_tools/
../../../../contrib/gcc/print-rtl.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/read-rtl.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/rtl.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../
../../contrib/gcc/varray.c options.c insn-conditions.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genattr.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/gencodes.c 
/usr/src/gnu/usr
.bin/cc/cc_tools/../../../../contrib/gcc/genconfig.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genemit.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genextract.c 
/usr/src/gnu/usr
.bin/cc/cc_tools/../../../../contrib/gcc/genflags.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genopinit.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genoutput.c 
/usr/src/gnu/usr
.bin/cc/cc_tools/../../../../contrib/gcc/genpeep.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genrecog.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genattrtab.c 
/usr/src/gnu/usr.
bin/cc/cc_tools/../../../../contrib/gcc/genconstants.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genconditions.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genmodes.c 
/usr/src/g
nu/usr.bin/cc/cc_tools/../../../../contrib/gcc/gencheck.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/gengenrtl.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/genpreds.c 
genrtl.c in
sn-modes.c min-insn-modes.c gengtype-yacc+%DIKED.c gengtype-lex.c 
/usr/src/gnu/usr.bin/cc/cc_tools/../../../../contrib/gcc/gengtype.c 
gtype-desc.c
===> gnu/usr.bin/cc/cc_int
/usr/obj/usr/src/i386/usr/src/gnu/usr.bin/cc/cc_int/../cc_tools/genattrtab 
/usr/src/gnu/usr.bin/cc/cc_int/../../../../contrib/gcc/config/i386/i386.md 
 > insn-attrtab.c

Automaton `pentium'
       48 NDFA states,            138 NDFA arcs
       48 DFA states,             138 DFA arcs
       20 minimal DFA states,      82 minimal DFA arcs
      158 all insns         17 insn equivalence classes
   91 transition comb vector els,   340 trans table els: use comb vect
   91 state alts comb vector els,   340 state alts table els: use comb vect
  340 min delay table els, compression factor 2

Automaton `pentium_fpu'
       80 NDFA states,            172 NDFA arcs
       80 DFA states,             172 DFA arcs
       75 minimal DFA states,     162 minimal DFA arcs
      158 all insns          8 insn equivalence classes
  164 transition comb vector els,   600 trans table els: use comb vect
  164 state alts comb vector els,   600 state alts table els: use comb vect
  600 min delay table els, compression factor 1

Automaton `athlon'
      518 NDFA states,           1668 NDFA arcs
      518 DFA states,            1668 DFA arcs
       76 minimal DFA states,     328 minimal DFA arcs
      158 all insns         10 insn equivalence classes
  382 transition comb vector els,   760 trans table els: use simple vect
  382 state alts comb vector els,   760 state alts table els: use simple 
vect
  760 min delay table els, compression factor 2

Automaton `athlon_load'
      162 NDFA states,            855 NDFA arcs
      162 DFA states,             855 DFA arcs
      162 minimal DFA states,     855 minimal DFA arcs
      158 all insns         10 insn equivalence classes
 1039 transition comb vector els,  1620 trans table els: use simple vect
 1039 state alts comb vector els,  1620 state alts table els: use simple 
vect
 1620 min delay table els, compression factor 2

Automaton `athlon_mult'
       16 NDFA states,             48 NDFA arcs
       16  DFA states,             48 DFA arcs
       16 minimal DFA states,      48 minimal DFA arcs
      158 all insns          4 insn equivalence classes
   52 transition comb vector els,    64 trans table els: use simple vect
   52 state alts comb vector els,    64 state alts table els: use simple 
vect
   64 min delay table els, compression factor 2

Automaton `athlon_fp'
    15522 NDFA states,          99908 NDFA arcs
    15522 DFA states,           99908 DFA arcs
      463 minimal DFA states,    3038 minimal DFA arcs
      158 all insns         21 insn equivalence classes
 3051 transition comb vector els,  9723 trans table els: use comb vect
 3051 state alts comb vector els,  9723 state alts table els: use comb vect
 9723 min delay table els, compression factor 1

17012 all allocated states,     101385 all allocated arcs
20258 all allocated alternative states
 4779 all transition comb vector els, 13107 all trans table els
 4779 all state alts comb vector els, 13107 all state alts table els
13107 all min delay table els
    0 locked states num

  transformation: 0.059617, building DFA: 40.104570
  DFA minimization: 1.423352, making insn equivalence: 0.004922
 all automaton generation: 42.071873, output: 0.593320
Killed
*** Error code 137

Stop in /usr/src/gnu/usr.bin/cc/cc_int.
*** Error code 1

Stop in /usr/src/gnu/usr.bin/cc.
*** Error code 1

Stop in /usr/src.
*** Error code 1

Stop in /usr/src.
*** Error code 1

Stop in /usr/src.